JPH01106560U - - Google Patents
Info
- Publication number
- JPH01106560U JPH01106560U JP20090587U JP20090587U JPH01106560U JP H01106560 U JPH01106560 U JP H01106560U JP 20090587 U JP20090587 U JP 20090587U JP 20090587 U JP20090587 U JP 20090587U JP H01106560 U JPH01106560 U JP H01106560U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- target
- film
- forming
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000181 anti-adherent effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20090587U JPH01106560U (en]) | 1987-12-29 | 1987-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20090587U JPH01106560U (en]) | 1987-12-29 | 1987-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01106560U true JPH01106560U (en]) | 1989-07-18 |
Family
ID=31491290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20090587U Pending JPH01106560U (en]) | 1987-12-29 | 1987-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01106560U (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921662B2 (ja) * | 1979-12-28 | 1984-05-21 | 井関農機株式会社 | 自動籾摺選別装置に於ける仕切上米篩別装置 |
| JPS61210190A (ja) * | 1985-03-14 | 1986-09-18 | Nippon Denso Co Ltd | 薄膜形成装置 |
| JPS62200906A (ja) * | 1986-02-28 | 1987-09-04 | Uro Denshi Kogyo Kk | 広帯域方向性結合器 |
-
1987
- 1987-12-29 JP JP20090587U patent/JPH01106560U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921662B2 (ja) * | 1979-12-28 | 1984-05-21 | 井関農機株式会社 | 自動籾摺選別装置に於ける仕切上米篩別装置 |
| JPS61210190A (ja) * | 1985-03-14 | 1986-09-18 | Nippon Denso Co Ltd | 薄膜形成装置 |
| JPS62200906A (ja) * | 1986-02-28 | 1987-09-04 | Uro Denshi Kogyo Kk | 広帯域方向性結合器 |